Growth and properties of hybrid thin film systems – Pulsed laser deposition set-ups

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2 pulsed laser deposition set-ups: pulsed YAG laser at 266 nm coupled to a secondary vacuum chamber with a system of six targets, a heated sample holder (800 °C), and: pulsed YAG laser at 266 nm coupled with an ultra-vacuum chamber, 4 targets, heated sample holder up to 950 °C.

Pulsed laser deposition produces oxide films of complex composition and various properties. When several targets are used alternatively, it is possible to form multilayers and nanocomposites (metallic nanocrystals in an oxide matrix for example).



  • Yunlin Zheng: yunlin.zheng(at)