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The phononic microcavity is formed by two GaAs/AlAs superlattice, Distributed Bragg Reflector (DBR) mirrors and a λ/2 cavity. The DBRs are grown by MBE in-house at the INSP using a state-of-the-art Riber Compact 21 molecular beam epitaxy (MBE) machine for III-V semiconductor growth. The transmon qubits are made using ebeam lithography and angle evaporation using the Dolan bridge technique. All the measurements are performed in a cryogen-free dilution refrigerator equipped with high frequency electrical waveguides and cryogenic amplifiers.
Caption: Cryogen-free dilution refrigerator equipped with high frequency electrical waveguides and cryogenic amplifiers